26th World's Leading Trade Fair with Congress for
Photonics Components, Systems and Applications
June 27–30, 2023 | Messe München
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Heidelberg Instruments Mikrotechnik GmbH

Heidelberg Instruments Mikrotechnik GmbH
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Maskless laser lithography systems for the advanced micro- and nanofabrication

Company profile

Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless aligners (MLA) and nanofabrication tools.

With over 35 years of experience and well over 1,300 systems installed worldwide, we provide lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers. Industry stakeholders and working groups of the most renowned universities and research institutes all over the world use our systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more.

Product presentations

MLA 300 - MASKLESS ALIGNER

MLA 300 - MASKLESS ALIGNER

MPO 100 - 3D LITHOGRAPHY and 3D MICROPRINTING

MPO 100 - 3D LITHOGRAPHY and 3D MICROPRINTING

DWL 4000 GS – INDUSTRIAL GRAYSCALE LITHOGRAPHY

DWL 4000 GS – INDUSTRIAL GRAYSCALE LITHOGRAPHY

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Contact

Heidelberg Instruments Mikrotechnik GmbH
Mittelgewannweg 27, 69123 Heidelberg, Germany
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Mr. Wolfgang Meixner
Global Sales
Technical Sales Manager
Heidelberg Instruments Mikrotechnik GmbH