We can produce capillaries with high-precision, high-uniformity, circular, triangular and polygon cross-sections, plural holes, from trial production to mass production. The capillaries are made of vitreous silica and borosilicate glass. Fluorine-doped silica glass is used for making capillaries as the starting material with superior ultraviolet ray transmission and lower refractive index than non-doped vitreous silica. In recent years, fluorine-doped silica glass has attracted attention for applications such as capillaries for high-power laser combiner and micro UV lamps. We invented a new type of GRIN lenses composed of an array of silica glass GRIN lenses integrated by pure vitreous silica. This GRIN lens are used for silicon photonics, medical, optical sensors and imaging.