25th World's leading trade fair for components, systems and applications of photonics
April 26–29, 2022 | Messe München
Exhibitor portal
Mobile Navigation

Heidelberg Instruments Mikrotechnik GmbH

Heidelberg Instruments Mikrotechnik GmbH
Add to my favorites
 
Maskless laser lithography systems for micro- and nanofabrication

Company profile

Heidelberg Instruments is a world leader in the development and production of high precision maskless laser lithography systems and nanofabrication tools. With over 35 years of experience and an installed base of more than 1,200 systems worldwide at industrial customers and in academic facilities, we provide lithography solutions specifically tailored to meet all micro- and nanofabrication requirements of our customers, for the production of binary layouts and complex 2.5 and 3D structures in micro-optics, photonics, microfluidics and nanobiotechnology, electronics and communication technology and in materials science. Industry leaders in the fields of MEMS, BioMEMS, ASICS, TFT, displays, micro-optics, sensors, semiconductors and automotive are among our customers. 

Product presentations

MLA 300

MLA 300

MPO 100

MPO 100

DWL 4000 GS

DWL 4000 GS

Videos

Products and services

Contact

Heidelberg Instruments Mikrotechnik GmbH
Contact request
Twitter
LinkedIn
YouTube